I took the MAF sensor off - not sure how you would spray it without taking it off. It is two screws to take out and disconnecting the electrical wiring to it. Cleaning the MAF sensor is super easy and takes all of about 3 minutes, if you stop for a 1 or 2 minute break. The throttle body was the part that I didn't take off, though I'm sure pros would have done so. I just did as good of a job as I could without taking it off and was really careful not to move it manually and things seem fine now. Make sense? Good luck.
The Subaru dealership mechanics do not remove the throttle body for cleaning - that takes too much time and there is always more at risk of things breaking when doing so. They cleaned it the way you did.
